Smart mems and sensor systems /
In recent years, MEMS have revolutionized the semiconductor industry, with sensors being a particularly buoyant sector. Smart MEMS and Sensor Systems presents readers with the means to understand, evaluate, appreciate and participate in the development of the field, from a unique systems perspective...
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| Format: | Electronic eBook |
| Language: | English |
| Published: |
London :
Imperial College Press,
©2006.
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| Series: | Online access with JISC subscription agreement: Knovel.
Catalogued Knovel SJ. |
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| Online Access: |
Full text (Emmanuel users only) |